SMC High Vacuum Angle Valve
Product Code: XLA-50-2-XF1A...
Available to Order
tech sheet
Details
Application
High Vacuum
Operation
Normally Closed Bellows Seal
Seal Material
FKM
Brand
SMC
Feature
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Body Material
Aluminium
Series
XL2
Manufacturer
SMC
Ambient Temperature
5 to 60°C
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Application
Width mm
Actuation
Valve Material
Operation
Angle
Height mm
Feature
Seal Type
Actuator Working Temperature
List Price
60
High vacuum angle valve for semiconductor and vacuum applications
108
Single acting
Aluminium
Normally Closed
Angle valve
38
Bellows seal
–
–
Available to Order
98
–
171
–
–
–
–
66
–
–
–
Available to Order
98
–
171
Single acting
–
Normally Closed
–
66
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Bellows Seal
–
Available to Order
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
Normally Closed Bellows Seal
–
–
–
–
–
Available to Order
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–
Normally Closed
–
–
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–
Available to Order
59
–
108
Normally Closed
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38
–
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–
Available to Order
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Available to Order
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Normally Closed
–
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Available to Order
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High Vacuum
–
–
–
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Normally Closed
–
–
–
5 to 60°C
Available to Order
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Available to Order
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High vacuum applications
–
Single acting
–
Normally Closed
–
–
Bellows seal
–
–
Available to Order
104
–
171
–
–
–
–
66
–
–
–
Available to Order
–
High Vacuum
–
–
–
Normally Closed Bellows Seal
–
–
–
–
–
Available to Order
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
–
–
–
Normally Closed, Single Acting, Bellows Seal
–
–
–
–
5 to 60°C
Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order