SMC High Vacuum Angle Valve
Product Code: XLA-25G-2...
Available to Order
tech sheet
Details
Feature
Bellows seal
Seal Material
FKM
Brand
SMC
Actuation
Single acting
Operation
Normally Closed
Body Material
Aluminium
Series
XL2
Application
High vacuum applications
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Ambient Temperature
Application
Width mm
Valve Material
Angle
Height mm
Seal Type
Feature
Operation
Actuation
Actuator Working Temperature
List Price
60
5 to 60°C
High vacuum angle valve for semiconductor and vacuum applications
108
Aluminium
Angle valve
38
–
Bellows seal
Normally Closed
Single acting
–
Available to Order
98
–
–
171
–
–
66
–
–
–
–
–
Available to Order
98
–
–
171
–
–
66
Bellows Seal
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Normally Closed
Single acting
–
Available to Order
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
–
–
Normally Closed Bellows Seal
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Normally Closed
–
Available to Order
59
–
–
108
–
–
38
–
–
–
Normally Closed
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Normally Closed
–
Available to Order
–
–
High Vacuum
–
–
Normally Closed
–
–
–
–
–
5 to 60°C
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
104
–
–
171
–
–
66
–
–
–
–
–
Available to Order
–
5 to 60°C
High Vacuum
–
–
–
–
–
–
Normally Closed Bellows Seal
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
–
–
Normally Closed, Single Acting, Bellows Seal
–
5 to 60°C
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
High Vacuum
–
–
–
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
–
–
Available to Order