SMC High Vacuum Angle Valve
Product Code: XLA-16G-2M9//...
Available to Order
tech sheet
Details
Valve Material
Aluminium
Feature
Bellows seal
Height mm
38
Seal Material
FKM
Brand
SMC
Actuation
Single acting
Length mm
60
Operation
Normally Closed
Width mm
108
Body Material
Aluminium
Series
XL2
Angle
Angle valve
Application
High vacuum angle valve for semiconductor and vacuum applications
Manufacturer
SMC
Ambient Temperature
5 to 60°C
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Length mm
Width mm
Seal Type
Feature
Operation
Actuation
Application
Angle
Actuator Working Temperature
List Price
66
98
171
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–
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Available to Order
66
98
171
Bellows Seal
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Normally Closed
Single acting
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–
–
Available to Order
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Normally Closed Bellows Seal
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
Available to Order
–
–
–
–
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Normally Closed
–
–
–
Available to Order
38
59
108
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–
Normally Closed
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Available to Order
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Available to Order
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Normally Closed
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Available to Order
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High Vacuum
Normally Closed
5 to 60°C
Available to Order
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Available to Order
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Bellows seal
Normally Closed
Single acting
High vacuum applications
–
–
Available to Order
66
104
171
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–
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–
–
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–
Available to Order
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Normally Closed Bellows Seal
–
High Vacuum
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–
Available to Order
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Available to Order
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Normally Closed, Single Acting, Bellows Seal
–
High vacuum angle valve for semiconductor and vacuum applications
–
5 to 60°C
Available to Order
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–
Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
–
High Vacuum
–
–
Available to Order