SMC High Vacuum Angle Valve
Product Code: XLA-63-2M9//- Buy Price(exc VAT)
tech sheet
Details
Seal Material
FKM
Brand
SMC
Actuator Working Temperature
5 to 60°C
Operation
Normally Closed, Single Acting, Bellows Seal
Body Material
Aluminium
Series
XL2
Application
High vacuum angle valve for semiconductor and vacuum applications
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Ambient Temperature
Width mm
Actuation
Valve Material
Operation
Angle
Height mm
Feature
Seal Type
Application
List Price
60
5 to 60°C
108
Single acting
Aluminium
Normally Closed
Angle valve
38
Bellows seal
–
High vacuum angle valve for semiconductor and vacuum applications
Available to Order
98
–
171
–
–
–
–
66
–
–
–
Available to Order
98
–
171
Single acting
–
Normally Closed
–
66
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Bellows Seal
–
Available to Order
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–
–
–
–
Normally Closed Bellows Seal
–
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
Available to Order
–
–
–
Normally Closed
–
–
–
–
–
–
–
Available to Order
59
–
108
Normally Closed
–
–
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38
–
–
–
Available to Order
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–
–
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Available to Order
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Normally Closed
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Available to Order
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Normally Closed
–
–
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High Vacuum
Available to Order
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Available to Order
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Single acting
–
Normally Closed
–
–
Bellows seal
–
High vacuum applications
Available to Order
104
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171
–
–
–
–
66
–
–
–
Available to Order
–
5 to 60°C
–
–
–
Normally Closed Bellows Seal
–
–
–
–
High Vacuum
Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Normally Closed Bellows Seal
–
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
High Vacuum
Available to Order