SMC High Vacuum Angle Valve
Product Code: XLA-40-2- Buy Price(exc VAT)
tech sheet
Details
Width mm
171
Seal Material
FKM
Brand
SMC
Body Material
Aluminium
Series
XL2
Manufacturer
SMC
Length mm
98
Height mm
66
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Ambient Temperature
Application
Width mm
Actuation
Valve Material
Operation
Angle
Height mm
Feature
Seal Type
Actuator Working Temperature
List Price
60
5 to 60°C
High vacuum angle valve for semiconductor and vacuum applications
108
Single acting
Aluminium
Normally Closed
Angle valve
38
Bellows seal
–
–
Available to Order
98
–
–
171
Single acting
–
Normally Closed
–
66
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Bellows Seal
–
Available to Order
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
Normally Closed Bellows Seal
–
–
–
–
–
Available to Order
–
–
–
–
Normally Closed
–
–
–
–
–
–
–
Available to Order
59
–
–
108
Normally Closed
–
–
–
38
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
Normally Closed
–
–
–
–
–
–
–
Available to Order
–
–
High Vacuum
–
–
–
–
Normally Closed
–
–
–
5 to 60°C
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
High vacuum applications
–
Single acting
–
Normally Closed
–
–
Bellows seal
–
–
Available to Order
104
–
–
171
–
–
–
–
66
–
–
–
Available to Order
–
5 to 60°C
High Vacuum
–
–
–
Normally Closed Bellows Seal
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
Normally Closed, Single Acting, Bellows Seal
–
–
–
–
5 to 60°C
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
High Vacuum
–
–
–
Normally Closed Bellows Seal
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
Available to Order