SMC High Vacuum Angle Valve
Product Code: XLA-63G-2M9//...
Available to Order
tech sheet
Details
Operation
Normally Closed Bellows Seal
Seal Material
FKM
Brand
SMC
Body Material
Aluminium
Series
XL2
Application
High vacuum angle valve for semiconductor and vacuum applications
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Ambient Temperature
Width mm
Actuation
Valve Material
Operation
Angle
Height mm
Feature
Seal Type
Application
Actuator Working Temperature
List Price
60
5 to 60°C
108
Single acting
Aluminium
Normally Closed
Angle valve
38
Bellows seal
–
High vacuum angle valve for semiconductor and vacuum applications
–
Available to Order
98
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171
–
–
–
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66
–
–
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Available to Order
98
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171
Single acting
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Normally Closed
–
66
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Bellows Seal
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Available to Order
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Normally Closed
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Available to Order
59
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108
Normally Closed
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38
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Available to Order
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Available to Order
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Normally Closed
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Available to Order
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Normally Closed
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High Vacuum
5 to 60°C
Available to Order
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Available to Order
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Single acting
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Normally Closed
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Bellows seal
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High vacuum applications
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Available to Order
104
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171
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66
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Available to Order
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5 to 60°C
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Normally Closed Bellows Seal
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High Vacuum
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Available to Order
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Available to Order
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Normally Closed, Single Acting, Bellows Seal
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High vacuum angle valve for semiconductor and vacuum applications
5 to 60°C
Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Normally Closed Bellows Seal
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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High Vacuum
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Available to Order