SMC High Vacuum Angle Valve
Product Code: XLA-25-2M9//XF1AManufacturer Code: XLA-25-2M9//-XF1A...
Available to Order
tech sheet
Details
Brand
SMC
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Body Material
Seal Material
Ambient Temperature
Application
Width mm
Actuation
Valve Material
Operation
Series
Angle
Height mm
Feature
Seal Type
Actuator Working Temperature
List Price
60
Aluminium
FKM
5 to 60°C
High vacuum angle valve for semiconductor and vacuum applications
108
Single acting
Aluminium
Normally Closed
XL2
Angle valve
38
Bellows seal
–
–
Available to Order
98
Aluminium
FKM
–
–
171
–
–
–
XL2
–
66
–
–
–
Available to Order
98
Aluminium
FKM
–
–
171
Single acting
–
Normally Closed
XL2
–
66
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Bellows Seal
–
Available to Order
–
Aluminium
FKM
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
Normally Closed Bellows Seal
XL2
–
–
–
–
–
Available to Order
–
Aluminium
FKM
–
–
–
Normally Closed
–
–
XL2
–
–
–
–
–
Available to Order
59
Aluminium
FKM
–
–
108
Normally Closed
–
–
XL2
–
38
–
–
–
Available to Order
–
Aluminium
FKM
–
–
–
–
–
–
XL2
–
–
–
–
–
Available to Order
–
Aluminium
FKM
–
–
–
Normally Closed
–
–
XL2
–
–
–
–
–
Available to Order
–
Aluminium
FKM
–
High Vacuum
–
–
–
–
XL2
Normally Closed
–
–
–
5 to 60°C
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
Aluminium
FKM
–
High vacuum applications
–
Single acting
–
Normally Closed
XL2
–
–
Bellows seal
–
–
Available to Order
104
Aluminium
FKM
–
–
171
–
–
–
XL2
–
66
–
–
–
Available to Order
–
Aluminium
FKM
5 to 60°C
High Vacuum
–
–
–
Normally Closed Bellows Seal
XL2
–
–
–
–
–
Available to Order
–
Aluminium
FKM
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
Normally Closed, Single Acting, Bellows Seal
XL2
–
–
–
–
5 to 60°C
Available to Order
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–
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–
Available to Order
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Available to Order
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Available to Order
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Available to Order
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–
Available to Order
–
Aluminium
FKM
–
High Vacuum
–
–
–
Normally Closed Bellows Seal
XL2
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
Available to Order