SMC High Vacuum Angle Valve
Product Code: XLA-16-2M9//...
Available to Order
tech sheet
Details
Height mm
38
Seal Material
FKM
Brand
SMC
Length mm
59
Width mm
108
Body Material
Aluminium
Series
XL2
Manufacturer
SMC
Actuation
Normally Closed
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Ambient Temperature
Application
Actuation
Valve Material
Operation
Angle
Feature
Height mm
Width mm
Seal Type
Actuator Working Temperature
List Price
60
5 to 60°C
High vacuum angle valve for semiconductor and vacuum applications
Single acting
Aluminium
Normally Closed
Angle valve
Bellows seal
38
108
–
–
Available to Order
98
–
–
–
–
–
–
–
66
171
–
–
Available to Order
98
–
–
Single acting
–
Normally Closed
–
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
66
171
Bellows Seal
–
Available to Order
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–
High vacuum angle valve for semiconductor and vacuum applications
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Normally Closed Bellows Seal
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–
Available to Order
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Normally Closed
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Available to Order
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Available to Order
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Normally Closed
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Available to Order
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High Vacuum
–
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Normally Closed
–
–
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–
5 to 60°C
Available to Order
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Available to Order
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High vacuum applications
Single acting
–
Normally Closed
–
Bellows seal
–
–
–
–
Available to Order
104
–
–
–
–
–
–
–
66
171
–
–
Available to Order
–
5 to 60°C
High Vacuum
–
–
Normally Closed Bellows Seal
–
–
–
–
–
–
Available to Order
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
–
–
Normally Closed, Single Acting, Bellows Seal
–
–
–
–
–
5 to 60°C
Available to Order
–
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–
Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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High Vacuum
–
–
Normally Closed Bellows Seal
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
Available to Order