Details
Valve Material
Aluminium
Height mm
48
Seal Material
FKM
Brand
SMC
Seal Type
Bellows Seal
Length mm
74
Feature
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Body Material
Aluminium
Series
XL2
Application
High vacuum angle valve for semiconductor and vacuum applications
Manufacturer
SMC
Actuation
Normally Closed
Width mm
121
Specification
SMC High Vacuum Angle Valve, SMC
