SMC High Vacuum Angle Valve
Product Code: XLA-16G-2-XF1A...
Available to Order
tech sheet
Details
Feature
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Application
High vacuum applications requiring minimal contamination and corrosion resistance
Seal Material
FKM
Brand
SMC
Actuation
Single acting
Seal Type
Bellows Seal
Operation
Normally Closed
Flange Specification
KF NW
Body Material
Aluminium
Series
XL2
Angle
Angle valve
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Ambient Temperature
Application
Width mm
Valve Material
Height mm
Feature
Operation
Actuation
Angle
Actuator Working Temperature
List Price
60
5 to 60°C
High vacuum angle valve for semiconductor and vacuum applications
108
Aluminium
38
Bellows seal
Normally Closed
Single acting
Angle valve
–
Available to Order
98
–
–
171
–
66
–
–
–
–
–
Available to Order
98
–
–
171
–
66
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Normally Closed
Single acting
–
–
Available to Order
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
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Normally Closed Bellows Seal
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–
–
Available to Order
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Normally Closed
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Available to Order
59
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108
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38
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Normally Closed
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Available to Order
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Available to Order
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Normally Closed
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Available to Order
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High Vacuum
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Normally Closed
5 to 60°C
Available to Order
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Available to Order
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High vacuum applications
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Bellows seal
Normally Closed
Single acting
–
–
Available to Order
104
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171
–
66
–
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–
Available to Order
–
5 to 60°C
High Vacuum
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Normally Closed Bellows Seal
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Available to Order
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
Normally Closed, Single Acting, Bellows Seal
–
–
5 to 60°C
Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order