SMC High Vacuum Angle Valve
Product Code: XLA-16-2...
Available to Order
tech sheet
Details
Application
High Vacuum
Seal Material
FKM
Brand
SMC
Seal Type
Bellows Seal
Operation
Normally Closed
Body Material
Aluminium
Series
XL2
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Ambient Temperature
Application
Width mm
Actuation
Valve Material
Angle
Height mm
Feature
Operation
Actuator Working Temperature
List Price
60
5 to 60°C
High vacuum angle valve for semiconductor and vacuum applications
108
Single acting
Aluminium
Angle valve
38
Bellows seal
Normally Closed
–
Available to Order
98
–
–
171
–
–
–
66
–
–
–
Available to Order
98
–
–
171
Single acting
–
–
66
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Normally Closed
–
Available to Order
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
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Normally Closed Bellows Seal
–
Available to Order
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–
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Normally Closed
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–
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–
Available to Order
59
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108
Normally Closed
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38
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Available to Order
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Available to Order
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Normally Closed
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Available to Order
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High Vacuum
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Normally Closed
–
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–
5 to 60°C
Available to Order
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Available to Order
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High vacuum applications
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Single acting
–
–
–
Bellows seal
Normally Closed
–
Available to Order
104
–
–
171
–
–
–
66
–
–
–
Available to Order
–
5 to 60°C
High Vacuum
–
–
–
–
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–
Normally Closed Bellows Seal
–
Available to Order
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
–
–
Normally Closed, Single Acting, Bellows Seal
5 to 60°C
Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order