SMC Slit Valve
Product Code: XGT222-46236-1F...
Available to Order
tech sheet
Details
Material
Gate O-ring FKM
Brand
SMC
Series
XGT
Actuation
Cassette Type Standard
Manufacturer
SMC
Application
Partition valve between load lock chamber and transfer chamber and between transfer chamber and process chamber in semiconductor manufacturing equipment
Specification
SMC Slit Valve, SMC
Additional Variants
Product Name
Product Code
Valve Material
Model
Accessories
List Price
FKM (Gate O-ring Material)
XGT223-46236-1F
Gasket with wiper for bellows protection Rubber cushions for impact absorption End lock mechanism
Available to Order